JPH086239Y2 - 温度検出用管状サイト - Google Patents

温度検出用管状サイト

Info

Publication number
JPH086239Y2
JPH086239Y2 JP4631089U JP4631089U JPH086239Y2 JP H086239 Y2 JPH086239 Y2 JP H086239Y2 JP 4631089 U JP4631089 U JP 4631089U JP 4631089 U JP4631089 U JP 4631089U JP H086239 Y2 JPH086239 Y2 JP H086239Y2
Authority
JP
Japan
Prior art keywords
site
tubular
temperature
tubular site
temperature detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4631089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02140970U (en]
Inventor
通 高橋
和也 富樫
晴美 柴田
Original Assignee
コマツ電子金属株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コマツ電子金属株式会社 filed Critical コマツ電子金属株式会社
Priority to JP4631089U priority Critical patent/JPH086239Y2/ja
Publication of JPH02140970U publication Critical patent/JPH02140970U/ja
Application granted granted Critical
Publication of JPH086239Y2 publication Critical patent/JPH086239Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Radiation Pyrometers (AREA)
  • Chemical Vapour Deposition (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP4631089U 1989-04-21 1989-04-21 温度検出用管状サイト Expired - Lifetime JPH086239Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4631089U JPH086239Y2 (ja) 1989-04-21 1989-04-21 温度検出用管状サイト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4631089U JPH086239Y2 (ja) 1989-04-21 1989-04-21 温度検出用管状サイト

Publications (2)

Publication Number Publication Date
JPH02140970U JPH02140970U (en]) 1990-11-26
JPH086239Y2 true JPH086239Y2 (ja) 1996-02-21

Family

ID=31561282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4631089U Expired - Lifetime JPH086239Y2 (ja) 1989-04-21 1989-04-21 温度検出用管状サイト

Country Status (1)

Country Link
JP (1) JPH086239Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3770966B2 (ja) * 1996-07-16 2006-04-26 沖電気工業株式会社 酸窒化膜の形成方法

Also Published As

Publication number Publication date
JPH02140970U (en]) 1990-11-26

Similar Documents

Publication Publication Date Title
JP5652960B2 (ja) 原料気化供給装置
KR20030092305A (ko) 고온 언도우프 막 증착 설비의 챔버 외벽에 대한 온도측정장치
JPS6134929A (ja) 半導体結晶成長装置
JP5964293B2 (ja) 基板処理システムで使用するための窓アセンブリ
JPH086239Y2 (ja) 温度検出用管状サイト
JP4980672B2 (ja) 気相成長装置
JP3219184B2 (ja) 有機金属供給装置および有機金属気相成長装置
WO2008023697A1 (fr) système de croissance en phase vapeur
JP4331936B2 (ja) 化合物半導体の製造方法及び化合物半導体の製造装置
JPH0362790B2 (en])
JPS62112781A (ja) 化学蒸着装置及び化学蒸着方法
JPS60244332A (ja) 凝縮性材料のガス化供給装置
JPH0366121A (ja) 気相成長装置及び気相成長方法
Asada et al. An approach to gas flow measurement by laser induced fluorescence. Application to chemical vapor deposition
JPS5972718A (ja) 縦型気相成長装置
JPS63200523A (ja) 化学気相成長装置
JPS6286817A (ja) 有機金属熱分解気相成長方法
JPS63129033A (ja) ガラス原料供給方法
JPH054828A (ja) 高純度石英ガラス製造用加熱炉
JPH02275797A (ja) 気相成長装置
JPS60106969A (ja) 光ｃｖｄ装置
JPS63248797A (ja) 気相エピタキシヤル成長装置
JPS61216423A (ja) 気相成長による半導体製造装置
JPS61263119A (ja) 気相成長による半導体製造装置
JPS621332B2 (en])